Laser Annealing Processes in Semiconductor Technology

Theory, Modeling and Applications in Nanoelectronics

428 Seiten, Taschenbuch

Kurzbeschreibung des Verlags

Laser Annealing Processes in Semiconductor Technology: Theory, Modeling and Applications in Nanoelectronics synthesizes the scientific and technological advances of laser annealing processes for current and emerging nanotechnologies. The book provides an overview of the laser-matter interactions of materials and recent advances in modeling of laser-related phenomena, with the bulk of the book focusing on current and emerging (beyond-CMOS) applications. Reviewed applications include laser annealing of CMOS, group IV semiconductors, superconducting materials, photonic materials, 2D materials. This comprehensive book is ideal for post-graduate students, new entrants, and experienced researchers in academia, research and development in materials science, physics and engineering.

• Reihe: Woodhead Publishing
• ISBN: 9780128202555
• Sprache: Englisch
• Erscheinungsdatum: 30.04.2021
• Größe: 229 x 152 mm
• Verlag: Elsevier Inc
• Herausgegeben von: Fuccio Cristiano, Antonino La Magna