Fabrication of GAAS Devices

von Albert G Baca, Carol I H Ashby

Taschenbuch

Kurzbeschreibung des Verlags

This book provides fundamental and practical information on all aspects of GaAs processing and gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography. Other topics covered include device performance for HBTs (Heterojunction Bipolar Transistors) and FETs (Field Effect Transistors), how these relate to processing choices, and special processing issues such as wet oxidation, which are especially important in optoelectronic devices. This book is suitable for both new and practising engineers.

• ISBN: 9781849190671
• Sprache: Englisch
• Erscheinungsdatum: 01.02.2023
• Größe: 246 x 189 mm
• Verlag: Institution of Engineering & Technology