Ion Implantation and Annealing Applications, Science and Technology

Contributions from IIT School, Edition 2024

628 Seiten, Hardcover

Kurzbeschreibung des Verlags

This book compiles the insights and teachings from the 2024 IIT School lectures, offering a comprehensive look at ion implantation and annealing in semiconductor manufacturing. It covers the history of integrated circuits, common applications in CMOS technology, ion sources, radiation damage, annealing of materials like silicon (Si), silicon carbide (SiC) and gallium nitride (GaN), and advances in cluster ion beam technology. This edition, enriched by expert contributions, serves as an essential reference for students and professionals in materials science and microelectronics.

• Reihe: Topics in Applied Physics
• Themen: Technologie, Ingenieurswissenschaft, Landwirtschaft, Industrieprozesse Elektronik, Nachrichtentechnik Elektronik Elektronische Geräte und Materialien
• ISBN: 9783032100078
• Sprache: Englisch
• Erscheinungsdatum: 30.05.2026
• Größe: 23.5 x 15.5 cm
• Verlag: Springer International Publishing
• Herausgegeben von: Wilfried Lerch, Michael Current