Chemistry of Atomic Layer Deposition

von Seán Thomas Barry

105 Seiten, Taschenbuch

Kurzbeschreibung des Verlags

This book will help chemists and non-chemists alike understand the fundamentals of surface chemistry and precursor design, and how these precursors drive the processes of atomic layer deposition, and how the surface-precursor interaction governs atomic layer deposition processes. The underlying principles in atomic layer deposition rely on the chemistry of a precursor with a surface.

• Reihe: De Gruyter Textbook
• ISBN: 9783110712513
• Sprache: Englisch
• Erscheinungsdatum: 22.11.2021
• Genre: Technik/Chemische Technik
• Verlag: De Gruyter