Predictive Simulation of Semiconductor Processing

Status and Challenges

490 Seiten, Taschenbuch

Kurzbeschreibung des Verlags

Predictive Simulation of Semiconductor Processing
 enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool.

• Reihe: Springer Series in Materials Science
• ISBN: 9783642058042
• Sprache: Englisch
• Erscheinungsdatum: 04.12.2010
• Genre: Technik/Maschinenbau, Fertigungstechnik
• Verlag: Springer Berlin
• Herausgegeben von: Jarek Dabrowski, Eicke R. Weber