Low-Energy Ion Irradiation of Solid Surfaces

von Hubert Gnaser

294 Seiten, Taschenbuch

Kurzbeschreibung des Verlags

The book presents an overview on important aspects of ion irradiation of surfaces, emphasizing low impact energies. Specifically, ion penetration and implantation into solids, defect creation and amorphization of semiconductors, sputtering of elemental and multicomponent targets, and ionization processes of emitted species are discussed. It provides a synoptic view of these phenomena which are strongly interrelated by the same basic processes, but are often described separately and in diverging terminology. The book tries to bridge this gap, summarizing results from experiments, computer simulations and theoretical approaches.

• Reihe: Springer Tracts in Modern Physics
• Themen: Technologie, Ingenieurswissenschaft, Landwirtschaft, Industrieprozesse Maschinenbau und Werkstoffe Materialwissenschaft
• ISBN: 9783662147399
• Sprache: Englisch
• Erscheinungsdatum: 20.11.2013
• Größe: 23.5 x 15.5 cm
• Verlag: Springer Berlin