CMOS-MEMS Fabrication Technologies and Devices

134 Seiten, Hardcover

Kurzbeschreibung des Verlags

This Reprint collects 10 outstanding peer-reviewed articles, focusing on CMOS-MEMS fabrication technologies and devices. The content of these articles is within the scope of a Special Issue. Within the articles, CMOS gas sensors are assessed for gas mixture analysis; CMOS-MEMS pixel sensors are used for thermal neutron imaging; resistive microbolometers are fabricated via the CMOS process; an MEMS Pirani sensor is utilized for in situ pressure distribution sensing; CMOS low-noise amplifiers, power amplifiers, and energy micro-harvesters are manufactured using CMOS-MEMS technology; and high aspect ratio TSVs are used for 3D integration. This Reprint is especially relevant for any readers with an interest in the abovementioned topics.

• Themen: Technologie, Ingenieurswissenschaft, Landwirtschaft, Industrieprozesse Technologie, allgemein
• ISBN: 9783725886616
• Sprache: Englisch
• Erscheinungsdatum: 09.09.2026
• Größe: 250 x 175 mm
• Verlag: MDPI AG