Nanolithography

A Borderland between STM, EB, IB, and X-Ray Lithographies

216 Seiten, Taschenbuch

Kurzbeschreibung des Verlags

Success in the fabrication of structures at the nanometer length scale has opened up a new horizon to condensed matter physics: the study of quantum phenomena in confined boxes, wires, rings, etc. A new class of electronic devices based on this physics has been proposed, with the promise of a new functionality for ultrafast and/or ultradense electronic circuits. Such applications demand highly sophisticated fabrication techniques, the crucial one being lithography. Nanolithography contains updated reviews by major experts on the well established techniques -- electron beam lithography (EBL), X-ray lithography (XRL), ion beam lithography (IBL) -- as well as on emergent techniques, such as scanning tunnelling lithography (STL).

• Reihe: NATO Science Series E:
• Themen: Mathematik und Naturwissenschaften Physik Materialwissenschaft / Aggregatzustände Physik der kondensierten Materie (Flüssigkeits- und Festkörperphysik)
• ISBN: 9789048143887
• Sprache: Englisch
• Erscheinungsdatum: 05.12.2010
• Größe: 23.5 x 15.5 cm
• Verlag: Springer Netherland
• Herausgegeben von: M. Gentili, Carlo Giovannella, Stefano Selci