Topics in Growth and Device Processing of III-V Semiconductors

von F. Ren, Chih Tang Sah, Stephen J Pearton, Cammy R Abernathy

560 Seiten, Hardcover

Kurzbeschreibung des Verlags

This book describes advanced epitaxial growth and self-aligned processing techniques for the fabrication of III-V semiconductor devices such as heterojunction bipolar transistors and high electron mobility transistors. It is the first book to describe the use of carbon-doping and low damage dry etching techniques that have proved indispensable in making reliable, high performance devices. These devices are used in many applications such as cordless telephones and high speed lightwave communication systems.

• ISBN: 9789810218843
• Sprache: Englisch
• Erscheinungsdatum: 09.11.1996
• Größe: 226 x 157 mm
• Verlag: World Scientific Publishing Company